06452292 is referenced by 57 patents and cites 7 patents.

A planar electric motor comprising a magnet array having a plurality of magnets with magnetic fields of alternating polarity and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array. The coil array includes a first linear coil array having a plurality of polygonal shaped coils extending longitudinally in a first direction, and a second linear coil array having a plurality of oval shaped coils extending longitudinally in a second direction generally orthogonal to said first direction. The motor is for use in moving a stage within an exposure apparatus having an optical system for imaging a pattern formed in a reticle onto an article supported by the stage.

Title
Planar motor with linear coil arrays
Application Number
9/603845
Publication Number
6452292 (B1)
Application Date
June 26, 2000
Publication Date
September 17, 2002
Inventor
Michael Binnard
Belmont
CA, US
Agent
Finnegan Henderson Farabow Garrett & Dunner L
US
Assignee
Nikon Corporation
US
IPC
H02K 41/00
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