06447126 is referenced by 336 patents and cites 1 patents.

A support pillar

426

for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material

422

supported by a substrate

400

and covered with a metal layer

406

. The support pillar

426

is fabricated by depositing a layer of pillar material on a substrate

400

, patterning the pillar layer to define a support pillar

426

, and depositing a metal layer

406

over the support pillar

426

enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer

432

over the pillars

426

. After applying the spacer layer

432

, holes

434

are patterned into the spacer layer to remove any spacer material that is covering the pillars. The spacer layer is then reflowed to fill the holes and lower the surface of the spacer layer such that the surface is coplanar with the tops of the support pillars

426.

Title
Support post architecture for micromechanical devices
Application Number
8/482098
Publication Number
6447126 (B1)
Application Date
June 7, 1995
Publication Date
September 10, 2002
Inventor
Larry J Hornbeck
Van Alstyne
TX, US
Agent
Frederick J Telecky Jr
US
Wade James Brady III
US
Charles A Brill
US
Assignee
Texas Instruments Incorporated
TX, US
IPC
G02B 7/182
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