06433993 is referenced by 61 patents and cites 1 patents.

Thin layer capacitors are formed from a first flexible metal layer, a dielectric layer between about 0.03 and about 2 microns deposited thereon, and a second flexible metal layer deposited on the dielectric layer. The first flexible metal layer may either be a metal foil, such as a copper, aluminum, or nickel foil, or a metal layer deposited on a polymeric support sheet. Depositions of the layers is by or is facilitate by combustion chemical vapor deposition or controlled atmosphere chemical vapor deposition.

Title
Formation of thin film capacitors
Application Number
9/283100
Publication Number
6433993 (B1)
Application Date
March 31, 1999
Publication Date
August 13, 2002
Inventor
Helmut G Hornis
Hudson
OH, US
Michelle Hendrick
Winder
GA, US
Tzyy Jiuan Hwang
Alpharetta
GA, US
Wen Yi Lin
Doraville
GA, US
Andrew T Hunt
Atlanta
GA, US
Agent
S Matthew Cairns
US
Alfred H Muratori
US
Wayne E Nacker
US
Assignee
MicroCoating Technologies
GA, US
IPC
H01G 4/005
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