06417914 is referenced by 131 patents and cites 1 patents.

The shift in the center of gravity of a stage device and the reaction force caused when at least one of a first and second stage devices move, are canceled out by moving a moving member. The shift in the center of gravity of a stage device and the reaction force caused when the stage devices move that cannot be canceled out by moving the moving member, are completely canceled out by moving a base. That is, even if at least one of the first and second stages move, the center of gravity of the stage device does not move, and the reaction force are reliably canceled. Accordingly, by concurrently performing exposure on the two substrates mounted on the first and second stages, the exposure throughput can be improved, and an exposure with a high precision can be performed.

Title
Stage device and exposure apparatus
Application Number
9/690728
Publication Number
6417914 (B1)
Application Date
October 18, 2000
Publication Date
July 9, 2002
Inventor
Shiwen Li
Kumagaya
US
Agent
Oblon Spivak McClelland Maier & Neustadt P C
US
Assignee
Nikon Corporation
US
IPC
G03B 27/58
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