06408878 is referenced by 417 patents and cites 9 patents.

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Title
Microfabricated elastomeric valve and pump systems
Application Number
9/796666
Publication Number
6408878 (B1)
Application Date
February 28, 2001
Publication Date
June 25, 2002
Inventor
Stephen R Quake
San Marino
CA, US
Axel Scherer
Laguna Beach
CA, US
Todd A Thorsen
Pasadena
CA, US
Hou Pu Chou
Pasadena
CA, US
Marc A Unger
South San Francisco
CA, US
Agent
Townsend & Townsend & Crew
US
Assignee
California Institute of Technology
CA, US
IPC
F16K 11/20
View Original Source