06407481 is referenced by 22 patents and cites 3 patents.

A piezoelectric/electrostrictive device is formed with a connecting plate, a diaphragm, and a substrate which are mutually joined. A joining direction of the connecting plate with the substrate and a joining direction of the connecting plate with the diaphragm are mutually intersected to form a cross. The diaphragm is straddled between the connecting plate and the substrate. A piezoelectric element is arranged on a surface of the diaphragm, and the diaphragm is convexly curved in a direction perpendicular to the two directions forming the cross. The piezoelectric/electrostrictive device is an element for converting electrical energy into mechanical energy such as a mechanical displacement, force or vibrations. Conversely, the piezoelectric/electrostrictive device may be employed to convert mechanical energy into electrical energy, as well as improve the operational characteristics thereof.

Title
Piezoelectric/electrostrictive device having convexly curved diaphragm
Application Number
9/516947
Publication Number
6407481 (B1)
Application Date
March 1, 2000
Publication Date
June 18, 2002
Inventor
Koji Kimura
Nagoya
US
Kazuhiro Yamamoto
Kasugai
US
Yukihisa Takeuchi
Aichi
US
Agent
Burr & Brown
US
Assignee
NGK Insulators
US
IPC
H01L 41/04
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