06384473 is referenced by 164 patents and cites 2 patents.

An apparatus for packaging of microelectronic devices, including an integral window. The microelectronic device can be a semiconductor chip, a CCD chip, a CMOS chip, a VCSEL chip, a laser diode, a MEMS device, or a IMEMS device. The package can include a cofired ceramic frame or body. The package can have an internal stepped structure made of one or more plates, with apertures, which are patterned with metallized conductive circuit traces. The microelectronic device can be flip-chip bonded on the plate to these traces, and oriented so that the light-sensitive side is optically accessible through the window. A cover lid can be attached to the opposite side of the package. The result is a compact, low-profile package, having an integral window that can be hermetically-sealed. The package body can be formed by low-temperature cofired ceramic (LTCC) or high-temperature cofired ceramic (HTCC) multilayer processes with the window being simultaneously joined (e.g. cofired) to the package body during LTCC or HTCC processing. Multiple chips can be located within a single package. The cover lid can include a window. The apparatus is particularly suited for packaging of MEMS devices, since the number of handling steps is greatly reduced, thereby reducing the potential for contamination.

Title
Microelectronic device package with an integral window
Application Number
9/571335
Publication Number
6384473 (B1)
Application Date
May 16, 2000
Publication Date
May 7, 2002
Inventor
Robert D Watson
Tijeras
NM, US
Kenneth A Peterson
Albuquerque
NM, US
Agent
Robert D Watson
US
Assignee
Sandia Corporation
NM, US
IPC
H01L 23/02
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