06353492 is referenced by 180 patents and cites 1 patents.

A torsional micro-mechanical mirror system includes a mirror assembly rotatably supported by a torsional mirror support assembly for rotational movement over and within a cavity in a base. The cavity is sized sufficiently to allow unimpeded rotation of the mirror assembly. The mirror assembly includes a support structure for supporting a reflective layer. The support structure is coplanar with and formed from the same wafer as the base. The torsional mirror support assembly includes at least one torsion spring formed of an electroplated metal. An actuator assembly is operative to apply a driving force to torsionally drive the torsional mirror support assembly, whereby torsional motion of the torsional mirror support assembly causes rotational motion of the mirror assembly. In another embodiment, a magnetic actuator assembly is provided to drive the mirror assembly. Other actuator assemblies are operative to push on the mirror assembly or provide electrodes spaced across the gap between the mirror assembly and the base. A process for fabricating the torsional micro-mirror is provided. The torsional micro-mirror is useful in various applications such as in biaxial scanner or video display systems.

Title
Method of fabrication of a torsional micro-mechanical mirror system
Application Number
9/753512
Publication Number
6353492 (B2)
Application Date
January 3, 2001
Publication Date
March 5, 2002
Inventor
Paul Martin Zavracky
Norwood
MA, US
Paul Daniel Aquilino
Canton
MA, US
Mark Bradley Spitzer
Sharon
MA, US
Noa More Rensing
West Newton
MA, US
Robert William McClelland
Norwell
MA, US
Agent
Weingarten Schurgin Gagnebin & Lebovici
US
Assignee
Northeastern University
MA, US
The Microoptical Corporation
MA, US
IPC
G02F 1/03
View Original Source