06323982 is referenced by 267 patents and cites 3 patents.

A high-yield micromirror device and fabrication method. Address electrodes (

310

) and a separate mirror bias/reset conductor (

312

) are disposed on a substrate (

304

). A micromirror superstructure including torsion beam support posts (

116

), torsion beam hinges (

120

), a torsion beam yoke (

114

), a mirror support post (

326

), and a mirror (

102

) is fabricated above, and electrically connected to, the mirror bias/reset conductor (

312

) such that the torsion beam yoke (

114

) and mirror (

102

) are suspended above the address electrodes (

310

). A dielectric layer (

328

) is formed over the address electrodes (

310

). The dielectric layer (

328

), coupled with the elimination of upper address electrodes used in the prior art electrically insulates the address electrodes (

310

) from contact with the mirror superstructure and prevents conductive debris from shorting either the mirror superstructure or mirror bias/reset conductor (

312

) to the address electrodes (

310

).

Title
Yield superstructure for digital micromirror device
Application Number
9/309745
Publication Number
6323982 (B1)
Application Date
May 11, 1999
Publication Date
November 27, 2001
Inventor
Larry J Hornbeck
Van Alstyne
TX, US
Agent
Frederick J Telecky Jr
US
Wade James Brady III
US
Charles A Brill
US
Assignee
Texas Instruments Incorporated
TX, US
IPC
G02B 26/08
View Original Source