06297644 is referenced by 89 patents and cites 16 patents.

A test structure which includes alternating grounded and floating conductive lines may be used to test the formation of conductive features on an integrated circuit topography. During irradiation of the conductive lines from an electron source, the grounded conductive lines will appear darker than the floating conductive lines when the test structure is inspected. If a short occurs between the conductive lines, due to an extra material defect, the portion of the floating line in the vicinity of the defect will also appear darkened. If an open appears along a grounded line, the non-grounded portion of the grounded line will be glowing. The grounded conductive lines are preferably grounded through a depletion-mode transistor. By applying a voltage to the transistor, the grounded line may be disconnected from ground, allowing electrical testing of the test structure. The electrical testing may be used to validate the voltage contrast methodology, as well as determine the approximate size of defects formed on the test structure.

Title
Multipurpose defect test structure with switchable voltage contrast capability and method of use
Application Number
9/262240
Publication Number
6297644 (B1)
Application Date
March 4, 1999
Publication Date
October 2, 2001
Inventor
Michael G McIntyre
Austin
TX, US
John L Nistler
Martindale
TX, US
Iraj Emami
Austin
TX, US
Richard W Jarvis
Austin
TX, US
Agent
Conley Rose & Tayon P C
US
Agent
Kevin L Daffer
US
Assignee
Advanced Micro Devices
CA, US
IPC
H01H 31/02
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