06296806 is referenced by 13 patents and cites 54 patents.

A detection system for detecting base contamination at low concentrations in gas, for instance to protect a sensitive process, characterized in that the detection system is constructed to examine multiple amines in gas to produce a reading stoichiometrically related to the proton bonding characteristic of the multiple amines present, the detection system comprising at least two channels through which a gas to be examined passes, an amines remover located in one of the channels, at least one thermal/catalytic converter which discharges NO for each channel, and at least one chemiluminescent NO detector, whereby the total amine concentration is determined from the difference between the detected signals for the channels.

Title
Protection of semiconductor fabrication and similar sensitive processes
Application Number
8/996790
Publication Number
6296806 (B1)
Application Date
December 23, 1997
Publication Date
October 2, 2001
Inventor
Devon A Kinkead
Cumberland
RI, US
Oleg P Kishkovich
Greenville
RI, US
Agent
Bowditch & Dewey
US
Assignee
Extraction Systems
MA, US
IPC
G01N 21/76
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