A spatial light modulator with an anti-reflective coating (ARC)
integrated into its structure. The manufacturing of the device is altered to include deposition of an ARC
and any necessary patterning and etching to allow the elements of the array to operate properly. The ARC could reside in several places of the element structure including over the addressing circuitry
over a middle layer
or on the underside of the reflective structure
Micromechanical spatial light modulators, as well as non-moving modulators, such as reflective and transmissive LCD modulators can use the invention.