06282010 is referenced by 302 patents and cites 3 patents.

A spatial light modulator with an anti-reflective coating (ARC)

100

integrated into its structure. The manufacturing of the device is altered to include deposition of an ARC

100,

and any necessary patterning and etching to allow the elements of the array to operate properly. The ARC could reside in several places of the element structure including over the addressing circuitry

26,

over a middle layer

32

or on the underside of the reflective structure

10.

Micromechanical spatial light modulators, as well as non-moving modulators, such as reflective and transmissive LCD modulators can use the invention.

Title
Anti-reflective coatings for spatial light modulators
Application Number
9/306271
Publication Number
6282010 (B1)
Application Date
May 6, 1999
Publication Date
August 28, 2001
Inventor
James D Huffman
Richardson
TX, US
Austin L Huang
Vancouver
WA, US
Henry W Trombley
Bristol
VT, US
Duane E Carter
Plano
TX, US
G Sreenivas
Dallas
TX, US
Brian L Ray
Richardson
TX, US
Frank C Sulzbach
Dallas
TX, US
Agent
Frederick J Telecky Jr
US
Wade James Brady III
US
Charles A Brill
US
Assignee
Texas Instruments Incorporated
TX, US
IPC
G02F 1/03
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