06270835 is referenced by 61 patents and cites 3 patents.

Thin layer capacitors are formed from a first flexible metal layer, a dielectric layer between about 0.03 and about 2 microns deposited thereon, and a second flexible metal layer deposited on the dielectric layer. The first flexible metal layer may either be a metal foil, such as a copper, aluminum, or nickel foil, or a metal layer deposited on a polymeric support sheet. Depositions of the layers is by or is facilitate by combustion chemical vapor deposition or controlled atmosphere chemical vapor deposition.

Title
Formation of this film capacitors
Application Number
9/414137
Publication Number
6270835 (B1)
Application Date
October 7, 1999
Publication Date
August 7, 2001
Inventor
George A Neuman
Suwanee
GA, US
John S Flanagan
Atlanta
GA, US
Andrew T Hunt
Atlanta
GA, US
Agent
Darryl P Frickey
US
Wayne E Nacker
US
Assignee
MicroCoating Technologies
GA, US
IPC
B05D 5/12
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