06230722 is referenced by 74 patents and cites 5 patents.

The wet treatment liquid feed nozzle of the invention comprises an introducing path

10

having an introducing port

7,

a discharging path

12

having a discharging port

15,

a crossing section

14

formed by causing the introducing path

10

and the discharging path

12

to cross at the other ends thereof, a nozzle assembly

50

having an opening section

6

opening to an object to be treated

1,

provided at the crossing section

14,

and pressure control means

13,

for controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treated

1

and the atmospheric pressure provided at least on the discharging path

12

side so that the wet treatment liquid having been in contact with the object to be treated

1

via the opening section

6

does not flow to outside the discharging path

12.

Title
Liquid feed nozzle, wet treatment, apparatus and wet treatment method
Application Number
9/83348
Publication Number
6230722 (B1)
Application Date
May 22, 1998
Publication Date
May 15, 2001
Inventor
Masayuki Toda
Yamagata-ken
US
Takayuki Imaoka
Tokyo
US
Tadahiro Ohmi
Miyagi-ken
US
Oh Eui Yeol
Kyongki-Do
US
Akira Abe
Miyagi-ken
US
Yasuhiko Kasama
Miyagi-ken
US
Kenichi Mitsumori
Miyagi-ken
US
Agent
Brinks Hofer Gilson & Lione
US
Assignee
Alps Electric
US
IPC
B08B 3/12
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