06225158 is referenced by 125 patents and cites 30 patents.

A trench storage dynamic random access memory cell with vertical transfer device can be formed in a wafer having prepared shallow trench isolation. Vertical transfer device is built as the deep trenches are formed. Using square printing to form shallow trench isolation and deep trenches, allows for scaling of the cell to very small dimensions.

Title
Trench storage dynamic random access memory cell with vertical transfer device
Application Number
9/86057
Publication Number
6225158 (B1)
Application Date
May 28, 1998
Publication Date
May 1, 2001
Inventor
Jack A Mandelman
Stormville
NY, US
William H Ma
Fishkill
NY, US
David V Horak
Essex Junction
VT, US
Mark C Hakey
Milton
VT, US
Toshiharu Furukawa
Essex Junction
VT, US
Agent
McGuireWoods
US
Agent
Howrd J Walter Esq
US
Assignee
International Business Machines Corporation
NY, US
IPC
H01L 21/8242
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