06124765 is referenced by 59 patents and cites 17 patents.

An integrated oscillator and associated methods are provided for providing clock signals. The integrated oscillator preferably includes a micro-mechanical oscillating circuit for providing an oscillating clock signal. The micro-mechanical oscillating circuit preferably includes a support layer, a fixed layer positioned on a support layer, remaining portions of a sacrificial layer positioned only on portions of the fixed layer, and an oscillating layer positioned on the remaining portions of the sacrificial layer, overlying the fixed layer in spaced relation therefrom, and extending lengthwise generally transverse to a predetermined direction for defining a released beam for oscillating at a predetermined frequency. The spaced relation is preferably formed by removal of unwanted portions of the sacrificial layer. The integrated oscillator also preferably includes a clock signal controlling circuit connected to the micro-mechanical oscillating circuit for controlling the micro-mechanical oscillating circuit and for generating clock signals therefrom.

Title
Integrated released beam oscillator and associated methods
Application Number
8/957804
Publication Number
6124765
Application Date
October 24, 1997
Publication Date
September 26, 2000
Inventor
Syama Sundar Sunkara
Collin
TX, US
Melvin Joseph DeSilva
Collin
TX, US
Tsiu Chiu Chan
Dallas
TX, US
Agent
Christopher F Regan
Lisa K Jorgenson
Theodore E Galanthay
Assignee
STMicroelectronics
TX, US
IPC
H01L 41/08
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