06079693 is referenced by 37 patents and cites 24 patents.

Isolation valves for selectively sealing a first region from a second region. A gate valve can include a housing which defines a channel between the first and second regions. The valve includes a gate, located in the housing, and displaceable between a stowed position and a deployed position. When the gate is in the stowed position, communication is permitted between the first and second regions. When the gate is in the deployed position, the gate spans the channel and can be controlled to isolate the first and second regions. The valves can be used, for example, in connection with systems for processing large glass substrates. The valves are particularly useful for isolating long rectangular openings, such as the openings in substrate processing chambers. Isolating processing chambers or load lock chambers from one another, for example, in a linear system, is facilitated.

Title
Isolation valves
Application Number
9/82376
Publication Number
6079693
Application Date
May 20, 1998
Publication Date
June 27, 2000
Inventor
John M White
Hayward
CA, US
Gary C Ettinger
Los Altos
CA, US
Agent
Thomason Moser and Patterson
Assignee
Applied Komatsu Technology
JP
IPC
F16K 3/10
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