06072313 is referenced by 75 patents and cites 33 patents.

The change in thickness of a film on an underlying body such as a semiconductor substrate is monitored in situ by inducing a current in the film, and as the thickness of the film changes (either increase or decrease), the changes in the current are detected. With a conductive film, eddy currents are induced in the film by a generating an alternating electromagnetic field with a sensor which includes a capacitor and an inductor.

Title
In-situ monitoring and control of conductive films by detecting changes in induced eddy currents
Application Number
419206
Publication Number
6072313
Application Date
June 17, 1997
Publication Date
June 6, 2000
Inventor
Tony Frederick Heinz
Chappaqua
NY, US
Arnold Halperin
Cortlandt Manor
NY, US
Steven George Barbee
Dover Plains
NY, US
Leping Li
Poughkeepsie
NY, US
Agent
Jay H Anderson
Alison D Mortinger
Assignee
International Business Machines Corporation
NY, US
IPC
G01B 7/06
H01L 21/302
H01L 21/20
H01L 21/66
View Original Source