06069392 is referenced by 65 patents and cites 7 patents.

A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed.

Title
Microbellows actuator
Application Number
9/57381
Publication Number
6069392
Application Date
April 8, 1998
Publication Date
May 30, 2000
Inventor
Xing Yang
Pasadena
CA, US
Yu Chong Tai
Pasadena
CA, US
Agent
Fish & Richardson P C
Assignee
California Institute of Technology
CA, US
IPC
H01L 29/82
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