06040937 is referenced by 689 patents and cites 47 patents.

An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.

Title
Interferometric modulation
Application Number
238750
Publication Number
6040937
Application Date
July 31, 1996
Publication Date
March 21, 2000
Inventor
Mark W Miles
Boston
MA, US
Agent
Fish & Richardson P C
Assignee
Etalon
MA, US
IPC
G02B 5/28
G02B 1/10
G02B 26/00
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