06033721 is referenced by 140 patents and cites 35 patents.

Apparatus for determining a best trajectory for laser CVD through a strategy of acquiring a series of two-dimensional plane images of the substrate. These images, taken together, contain topographical information as well as local reflectivity and thermal mapping information. The images are combined in digital format with additional substrate mapping information to calculate a best three-dimensional trajectory for the desired laser operation. The technique is especially suitable for compensation of tilt or severe height variation on microelectronic parts. The apparatus can deposit platinum conductors on integrated circuits by pyrolytic deposition from Pt(PF.sub.3).sub.4 vapor.

Title
Image-based three-axis positioner for laser direct write microchemical reaction
Application Number
8/329192
Publication Number
6033721
Application Date
October 26, 1994
Publication Date
March 7, 2000
Inventor
Nikos Nassuphis
Athens
GR
Agent
Lahive & Cockfield
Assignee
Revise
MA, US
IPC
G01K 3/00
G01C 11/12
C23C 8/00
C23C 16/48
View Original Source