06028689 is referenced by 231 patents and cites 4 patents.

Provided is a movable micromirror assembly wherein a mirror is mounted on, e.g. four flexible support arms, which are mounted in turn on a center support post. The post and arms resiliently support such mirror over, e.g. four address electrodes. The micromirror device is actuated like a parallel-plate capacitor by applying an address potential to the electrodes, which draw a part or all of the mirror toward same, countered by the spring force of the proximate support arms. Motion of the micromirror can be achieved along two axes since the device can be tilted and retracted according to the varying potentials applied to each of the four electrodes and the attractive force applied in turn to various portions of the micromirror in spaced proximity therewith. The support system of the micromirror is positioned beneath the mirror so that no reflective service area is lost to these features. Accordingly individual micromirror assemblies can be placed close to each other, in side by side array, to maximize the active surface area of such array. Thus each such micromirror can be tilted on two axes to scan one or more fields of regard and also can simultaneously be retracted or elevated to a desired depth to remove phase aberrations in the incident image by discreetly lengthening or shortening the optical path of the image reflected therefrom.

Title
Multi-motion micromirror
Application Number
8/788976
Publication Number
6028689
Application Date
January 24, 1997
Publication Date
February 22, 2000
Inventor
John H Comtois
Albuquerque
NM, US
Victor M Bright
Loveland
OH, US
M Adrian Michalicek
Albuquerque
NM, US
Agent
Thomas C Stover
Assignee
The United States of America represented by the Secretary of the Air Force
DC, US
IPC
G02B 26/08
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