06020964 is referenced by 144 patents and cites 3 patents.

A composite interferometer system has a plurality of X and/or Y measuring axes which co-operate with an X and/or Y measuring mirror arranged on an object. The interferometer system also has at least one Z measuring axis, which extends partly in an XY plane and co-operates with Z measuring mirrors arranged on the object and Z reflectors. Thus, a larger number of more accurate and reliable measurements can be performed with the interferometer system.

Title
Interferometer system and lithograph apparatus including an interferometer system
Application Number
9/114747
Publication Number
6020964
Application Date
July 13, 1998
Publication Date
February 1, 2000
Inventor
Alexander Straaijer
Eindhoven
NL
Erik R Loopstra
Heeze
NL
Agent
IP Group of Pillsbury Madison & Sutro
Assignee
ASM Lithography
NL
IPC
G01B 9/02
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