06016034 is referenced by 2 patents and cites 11 patents.

A method for forming a supported thin layer of non-evaporable getter (NEG) material and a getter device formed thereby are provided. A suspension comprised of non-evaporable getter (NEG) material particles in a dispersing medium is prepared. The NEG material particles in the suspension have a particle size not greater than about 150 .mu.m. The dispersing medium has an aqueous, alcoholic, or hydroalcoholic base and contains not more than about 1 wt % of organic compounds having a boiling temperature of at least about 250.degree. C. The ratio of the weight of the NEG material particles to the weight of the dispersing medium is between about 4:1 and about 1:1. A layer of the suspension is deposited on a carrier by a serigraphic technique. Next, the deposited layer is dried to evaporate volatile components of the dispersing medium and thereby form a dried deposit. Finally, the dried deposit is sintered under vacuum at a temperature between about 800.degree. C. and 1000.degree. C. with a surface of the dried deposit covered with a refractory material to inhibit scaling. Getter devices formed in accordance with this method also are provided.

Title
Method for forming supported thin layers of non-evaporable getter material and getter devices formed thereby
Application Number
855080
Publication Number
6016034
Application Date
September 17, 1998
Publication Date
January 18, 2000
Inventor
Michael L Ferris
Colorado Springs
CO, US
Richard C Kullberg
Colorado Springs
CO, US
Alessandro Gallitognotta
Milan
IT
Claudio Boffito
Milan
IT
Alessio Corazza
Como
IT
Agent
Hickman Stephens & Coleman
Assignee
SAES Getters S p A
IT
IPC
H01J 17/24
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