05994696 is referenced by 81 patents and cites 1 patents.

An apparatus for MEMS electrospray nozzle for mass spectroscopy formed with top and bottom of SiN, and a between layer of material. The material between the top and bottom forms a filter and also reduces the amount of dead space in the nozzle.

Title
MEMS electrospray nozzle for mass spectroscopy
Application Number
9/13961
Publication Number
5994696
Application Date
January 27, 1998
Publication Date
November 30, 1999
Inventor
Mike Davis
City of Hope
CA, US
Terry Lee
San Dimas
CA, US
Amish Desai
Altadena
CA, US
Yu Chong Tai
Pasadena
CA, US
Agent
Fish & Richardson P C
Assignee
California Institute of Technology
CA, US
IPC
B01D 59/44
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