05969848 is referenced by 42 patents and cites 3 patents.

A micromachined vertical actuator utilizing a levitational force, such as in electrostatic comb drives, provides vertical actuation that is relatively linear in actuation for control, and can be readily combined with parallel plate capacitive position sensing for position control. The micromachined electrostatic vertical actuator provides accurate movement in the sub-micron to micron ranges which is desirable in the phase modulation instrument, such as optical phase shifting. For example, compact, inexpensive, and position controllable micromirrors utilizing an electrostatic vertical actuator can replace the large, expensive, and difficult-to-maintain piezoelectric actuators. A thirty pound piezoelectric actuator with corner cube reflectors, as utilized in a phase shifting diffraction interferometer can be replaced with a micromirror and a lens. For any very precise and small amplitudes of motion` micromachined electrostatic actuation may be used because it is the most compact in size, with low power consumption and has more straightforward sensing and control options.

Title
Micromachined electrostatic vertical actuator
Application Number
8/888000
Publication Number
5969848
Application Date
July 3, 1997
Publication Date
October 19, 1999
Inventor
Peter A Krulevitch
Pleasanton
CA, US
Charles F McConaghy
Livermore
CA, US
Gary E Sommargren
Santa Cruz
CA, US
Abraham P Lee
Walnut Creek
CA, US
Agent
L E Carnahan
Assignee
The Regents of the University of California
CA, US
IPC
G02B 26/08
View Original Source