05963753 is referenced by 62 patents and cites 5 patents.

A substrate processing apparatus comprises a first substrate transfer unit having a first transfer path and a second substrate transfer unit having a second transfer path. A spin coating unit and a spin developing unit are arranged along the first transfer path, and a substrate cassette is arranged along the second transfer path. A substrate transport robot of the second substrate transfer unit selectively introduces a substrate received from a substrate transport robot of the first substrate transfer unit in one of external exposure apparatuses arranged on both end portions of the second transfer path, and discharges the substrate from the exposure apparatus for transfering the same to the substrate transport robot of the first substrate transfer unit. Thereby the substrate processing apparatus can avoid or relieve reduction of operational efficiency even if its throughput is different from that of an exposure apparatus.

Title
Substrate processing apparatus
Application Number
9/9100
Publication Number
5963753
Application Date
January 20, 1998
Publication Date
October 5, 1999
Inventor
Masao Tsuji
Kyoto
JP
Kaoru Aoki
Kyoto
JP
Ryuji Kitakado
Kyoto
JP
Tutomu Ueyama
Kyoto
JP
Minobu Matsunaga
Kyoto
JP
Masami Ohtani
Kyoto
JP
Agent
Ostrolenk Faber Gerb & Soffen
Assignee
Dainippon Screen Mfg
JP
IPC
G03D 5/00
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