05942871 is referenced by 117 patents and cites 70 patents.

In a stage for supporting an article, e.g. for a microlithographic system, the stage rides on a base and is driven in two orthogonal directions on the base along magnetic drive tracks by several drive coils riding in the drive tracks. Each drive coil, rather than being rigidly mounted to the stage, instead is connected to the stage by a tapered connecting member (beam). One end of each beam is connected to the stage by a double flexure assembly. The other end of each beam is connected to the drive coil by a similar double flexure assembly. Each double flexure assembly includes two orthogonal flexible members (stainless steel strips). Thus vibrations are reduced by use of this multiple flexible joints.

Title
Double flexure support for stage drive coil
Application Number
221375
Publication Number
5942871
Application Date
April 2, 1996
Publication Date
August 24, 1999
Inventor
Martin E Lee
Saratoga
CA, US
Agent
Oliff & Berridge
Assignee
Nikon Corporation
JP
IPC
G05B 5/01
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