05923563 is referenced by 57 patents and cites 4 patents.

The present invention is directed to a method for adding fill shapes to a chip in a manner which accommodates a wide range of within-chip pattern density variations and provides a tight pattern density control (i) within a chip and (ii) from chip to chip. The present invention imposes a grid over a chip design pattern, wherein each section of the grid contains a portion of the chip design. A pattern density is then determined for each section of the grid, based on that portion of the chip design pattern which lies within the particular grid section. The results of the pattern density determination are used to determine where to place fill shapes in the chip design in order to increase a density value in each section of the grid to that of a target density value. The method and apparatus of the present invention provide a best fit approximation to the desired pattern density consistent with a set of layout rules for the level being patterned.

Title
Variable density fill shape generation
Application Number
8/770925
Publication Number
5923563
Application Date
December 20, 1996
Publication Date
July 13, 1999
Inventor
William C Leipold
Essex Junction
VT, US
Mark A Lavin
Katonah
NY, US
Agent
Howard J Walter Jr
Assignee
International Business Machines Corporation
NY, US
IPC
G06F 17/50
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