05922105 is referenced by 16 patents and cites 18 patents.

A method and apparatus for preventing contamination of a substrate or a substrate surface, and particularly relates to prevention of contamination of raw materials, semi-finished products, base materials of products and substrate surface in a high-tech industry such as in the production of semiconductors and liquid crystals. A gas coming into contact with a base material or substrate is purified by dust removing apparatus and adsorption and/or absorption apparatus so that the concentration of fine particles in the gas is below class 1,000 and a non-methane hydrocarbon concentration is below 0.2 ppm. Thereafter, the base material or the substrate surface is exposed to this gas.

Title
Method and apparatus for the preparation of clean gases
Application Number
424545
Publication Number
5922105
Application Date
March 19, 1998
Publication Date
July 13, 1999
Inventor
Kazuhiko Sakamoto
Saitama-ken
JP
Hidetomo Suzuki
Kanagawa-ken
JP
Tsukuru Suzuki
Kanagawa-ken
JP
Toshiaki Fujii
Kanagawa-ken
JP
Agent
Oblon Spivak McClelland Maier & Neustadt P C
Assignee
Ebara Research
JP
IPC
B01D 53/04
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