05913978 is referenced by 50 patents and cites 10 patents.

A gas is supplied to a second chamber so that the pressure in the second chamber is raised to a predetermined level. A communication passage is provided for internally connecting the first and second chambers. When the pressure in the first chamber attains the predetermined level, the gas is allowed to flow from the second chamber into the first chamber through the communication passage. A gas flow can be checked when an open-close door is opened to connect the chambers. Thus, there is no substantial gas flow, so that particles can be prevented from being flung up.

Title
Apparatus and method for regulating pressure in two chambers
Application Number
8/629938
Publication Number
5913978
Application Date
April 12, 1996
Publication Date
June 22, 1999
Inventor
Sunao Muraoka
Yamanashi-ken
JP
Masahito Ozawa
Yamanashi-ken
JP
Susumu Kato
Yamanashi-ken
JP
Agent
Beveridge DeGrandi Weilacher & Young L
Assignee
Varian Japan K K T
JP
Tokyo Electron
JP
IPC
L23C 16/00
View Original Source