05863017 is referenced by 79 patents and cites 7 patents.

A laser system support structure is provided having an independent, kinematically mounted chamber and optics platform. Swivel-type mounts are used to couple the platform at three points to the laser support frame, thereby allowing the platform to remain static while the support frame, via the swivel mounts, deflects around the platform in response to external forces. The independent platform design provides secondary benefits of creating a compartmentalization of laser system components, leading to a modular type design. Each laser system module is mounted to the support structure on an extension rail, to allow removal of the module from the support frame for easy access during servicing.

Title
Stabilized laser platform and module interface
Application Number
8/583380
Publication Number
5863017
Application Date
January 5, 1996
Publication Date
January 26, 1999
Inventor
Jerry Rudy Gerent
Vista
CA, US
Curtiss Lynn Mixon
Encinitas
CA, US
Anthony John deRuyter
San Diego
CA, US
Donald Glenn Larson
San Diego
CA, US
Agent
David J Power
Assignee
Cymer
CA, US
IPC
F16M 11/00
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