05862058 is referenced by 40 patents and cites 13 patents.

An optical proximity correction method and system are disclosed that allows for the correction of line width deviations caused by nonlinear lithography tools by calculating required chrome on glass line widths for a desired printed line. Line width correction is determined based only on the pitch of the line, defined as the width of the line and the distance to an adjacent line. Correction information is calculated from an aerial simulation and is then organized by pitch to provide a more efficient means of line correction.

Title
Optical proximity correction method and system
Application Number
8/648745
Publication Number
5862058
Application Date
May 16, 1996
Publication Date
January 19, 1999
Inventor
Matthew R Wordeman
Mahopac
NY, US
Donald James Samuels
Yorktown Heights
NY, US
Agent
Schmeiser Olsen & Watts
Agent
Eric W Petraske
Assignee
International Business Machines Corporation
NY, US
IPC
H01L 21/82
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