05858065 is referenced by 46 patents and cites 70 patents.

Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; providing at least one size selective membrane having a feed side and a permeate side; contacting the feed side of the at least one membrane with the gas mixture; withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.

Title
Process and system for separation and recovery of perfluorocompound gases
Application Number
665142
Publication Number
5858065
Application Date
January 16, 1997
Publication Date
January 12, 1999
Inventor
Gregory K Fleming
Wilmington
DE, US
David Vassallo
Glenview
IL, US
Joseph E Paganessi
Burr Ridge
IL, US
Yao En Li
Buffalo Grove
IL, US
Agent
Burns Doane Swecker & Mathis L
Assignee
American Air Liquide
CA, US
IPC
B01D 53/22
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