05841579 is referenced by 147 patents and cites 313 patents.

A diffraction grating light valve modulates an incident beam of light. A plurality of elongated elements each have a reflective surface. The elongated elements are suspended with their respective ends substantially coplanar. Alternate ones of the elongated elements are electrically coupled for receiving a first bias voltage. The interdigitated elongated elements are electrically coupled for receiving a second bias voltage. By applying a appropriate first and second biasing voltages, all the reflective surfaces can be maintained in a first plane. When all the elongated elements are in the first plane, the diffraction grating light valve reflects the beam of light. A predetermined group of the elongated elements, preferably alternate ones, are deformable to be substantially coplanar in a second plane which is parallel to the first plane. When the predetermined group of elements is in the second plane, the diffraction grating light valve diffracts the beam of light.

Title
Flat diffraction grating light valve
Application Number
8/482188
Publication Number
5841579
Application Date
June 7, 1995
Publication Date
November 24, 1998
Inventor
Bryan P Straker
Palo Alto
CA, US
William C Banyai
East Palo Alto
CA, US
Dave B Corbin
Los Altos Hills
CA, US
David M Bloom
Portola Valley
CA, US
Agent
Haverstock & Owens
Assignee
Silicon Light Machines
CA, US
IPC
G03F 7/20
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