05840897 is referenced by 161 patents and cites 12 patents.

A metalorganic complex of the formula:

Title
Metal complex source reagents for chemical vapor deposition
Application Number
549389
Publication Number
5840897
Application Date
June 7, 1995
Publication Date
November 24, 1998
Inventor
Robin A Gardiner
Bethel
CT, US
Brian A Vaarstra
Nampa
ID, US
Thomas H Baum
New Fairfield
CT, US
Duncan W Brown
Wilton
CT, US
Peter S Kirlin
Bethel
CT, US
Agent
Oliver A M Zitzmann
Steven J Hultquist
Assignee
Advanced Technology Materials
CT, US
IPC
C07F 3/00
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