05830805 is referenced by 181 patents and cites 7 patents.

An electroless deposition apparatus and a method of electroless deposition that uses a single process chamber for performing multiple processes by moving through the process chamber a variety of fluids one at a time in a sequential order.

Title
Electroless deposition equipment or apparatus and method of performing electroless deposition
Application Number
8/751631
Publication Number
5830805
Application Date
November 18, 1996
Publication Date
November 3, 1998
Inventor
Prahalad K Vasudev
Austin
TX, US
Bin Zhao
Irvine
CA, US
Chiu H Ting
Saratoga
CA, US
Valery M Dubin
Cupertino
CA, US
Yosi Shacham Diamand
Ithaca
NY, US
Assignee
Intel Corporation
CA, US
Sematech
TX, US
Cornell Research Foundation
NY, US
IPC
H01L 21/44
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