05810945 is referenced by 19 patents and cites 21 patents.

An electronic device, particularly a solar cell, comprising a layer (16) of amorphous silicon (a-Si) and at least two layered electrodes (14, 18) each having an interface (20, 22) bordering said a-Si layer, in which at least one of the electrodes (14) is provided with pattern elements (14a) forming a preferably periodic micropattern. The average spacing of the pattern elements is preferably in the order of magnitude of the charge carrier drift lengths and is generally smaller than 1 .mu.m, particularly 50 to 500 nm. The micropattern is produced preferably by the effect of a laser beam interference pattern.

Title
Method of fabricating an electronic micropatterned electrode device
Application Number
8/545781
Publication Number
5810945
Application Date
March 14, 1996
Publication Date
September 22, 1998
Inventor
Moritz Heintze
Stuttgart
DE
Paulo V Santos
Stuttgart
DE
Christoph E Nebel
Munchen
DE
Martin Stutzmann
Stuttgart
DE
Agent
Nields Lemack & Dingman
Assignee
Max Planck Gesellschaft zur Forderung der Wissenschaften e V
DE
IPC
H01L 31/00
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