05786560 is referenced by 118 patents and cites 26 patents.

A method of treating a material by generating an ultraviolet wavelength laser beam having femtosecond pulses; splitting the ultraviolet wavelength laser beam into a plurality of separate laser beams having femtosecond pulses; directing the separate laser beams onto a target point within a sample such that the femtosecond pulses of the separate beams overlap to create an intensity sufficient to treat the sample. Apparatus for treating a material that includes an ultraviolet laser for generating an ultraviolet wavelength laser beam having femtosecond pulse and directing that ultraviolet wavelength laser beam onto a beam splitter; a beam splitter for splitting the ultraviolet wave length laser beam into a plurality of separate laser beams having femtosecond pulses; directing the separate laser beams onto a target point within a sample such that the femtosecond pulses of the separate beams overlap to create an intensity sufficient to treat the sample.

Title
3-dimensional micromachining with femtosecond laser pulses
Application Number
414348
Publication Number
5786560
Application Date
June 13, 1997
Publication Date
July 28, 1998
Inventor
Akira Fukumoto
Winchester
MA, US
Abdelkrim Tatah
Arlington
MA, US
Agent
Ratner & Prestia
Assignee
Panasonic Technologies
MA, US
IPC
B23K 26/06
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