05731697 is referenced by 46 patents and cites 27 patents.

The change in thickness of a film on an underlying body such as a semiconductor substrate is monitored in situ by inducing a current in the film, and as the thickness of the film changes (either increase or decrease), the changes in the current are detected. With a conductive film, eddy currents are induced in the film by a generating an alternating electromagnetic field with a sensor which includes a capacitor and an inductor.

Title
In-situ monitoring of the change in thickness of films
Application Number
419206
Publication Number
5731697
Application Date
May 1, 1996
Publication Date
March 24, 1998
Inventor
Tony Frederick Heinz
Chappaqua
NY, US
Arnold Halperin
Cortlandt Manor
NY, US
Steven George Barbee
Dover Plains
NY, US
Leping Li
Poughkeepsie
NY, US
Agent
Alison D Mortinger
Assignee
International Business Machines Corporation
NY, US
IPC
G01B 7/10
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