05705018 is referenced by 208 patents and cites 3 patents.

A micromachined pump including a channel formed in a semiconductor substrate by conventional processes such as chemical etching. A number of insulating barriers are established in the substrate parallel to one another and transverse to the channel. The barriers separate a series of electrically conductive strips. An overlying flexible conductive membrane is applied over the channel and conductive strips with an insulating layer separating the conductive strips from the conductive membrane. Application of a sequential voltage to the series of strips pulls the membrane into the channel portion of each successive strip to achieve a pumping action. A particularly desirable arrangement employs a micromachined push-pull dual channel cavity employing two substrates with a single membrane sandwiched between them.

Title
Micromachined peristaltic pump
Application Number
8/572186
Publication Number
5705018
Application Date
December 13, 1995
Publication Date
January 6, 1998
Inventor
Frank T Hartley
529 E. Las Flores Ave., Arcadia, 91006
CA, US
Agent
Price Gess & Ubell
IPC
B44C 1/22
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