05695564 is referenced by 213 patents and cites 18 patents.

A multi-chamber type process system for processing semiconductor wafers is constituted such that a plurality of units selected from process units, transfer units, interconnection units and in/out units are connected via gate valves. Each of the units has a casing with one or more openings through which each of the wafers passes. The gate valve is attached to a flange provided at the opening, thereby connecting the openings openably and air-tightly. The openings are situated such that the units are connected in a direction defined in units of substantially 90.degree., and the direction of transfer of the wafers is defined in units of substantially 90.degree.. Those of the openings of the casings of the units, which are not connected to the other openings of the casings, are air-tightly closed by blind plates such that the casings of the units form a vacuum chamber. The internal pressure of each of the casings of the units can be independently controlled.

Semiconductor processing system
Application Number
Publication Number
Application Date
August 3, 1995
Publication Date
December 9, 1997
Issei Imahashi
Oblon Spivak McClelland Maier & Neustadt P C
Tokyo Electron
C23C 16/00
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