05689063 is referenced by 35 patents and cites 25 patents.

Without necessitating complicated operations, an image of a low to medium magnification and an image of a high magnification are efficiently observed by an optical microscope and by an atomic force microscope, respectively. In the atomic force microscope, an atomic force microscope probe, whose size has been reduced since a device for detecting interatomic force is provided by a piezoelectric film, piezoresistance, or the like, is disposed between an objective lens of the optical microscope and a sample to be observed or at a position of the objective lens when the objective lens and the probe are constructed so as to be interchangeable, thereby enabling the optical microscope to confirm a scanning position of the atomic force microscope.

Title
Atomic force microscope using cantilever attached to optical microscope
Application Number
276021
Publication Number
5689063
Application Date
December 4, 1995
Publication Date
November 18, 1997
Inventor
Tetsuo Hattori
Yokohama
JP
Toru Fujii
Yamato
JP
Yoshinori Sango
Machida
JP
Tatsushi Nomura
Machida
JP
Shunji Watanabe
Setagaya-ku
JP
Takamitsu Fujiu
Zama
JP
Agent
Pennie & Edmonds
Assignee
Nikon Corporation
JP
IPC
G01B 5/78
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