05663637 is referenced by 20 patents and cites 3 patents.

Rotary signal coupling in in-situ monitoring of a chemical-mechanical polishing process. A sensor fixed to a rotatable wafer carrier for creating a signal responsive to the chemical mechanical polishing process is coupled to a bottom half of a rotary transformer fixed to a rotating portion of the polisher. A top half of the rotary transformer, coupled to the bottom half of the rotary transformer, is fixed to a stationary portion of the polisher. The signal from the sensor is thus coupled through the rotary transformer to a process monitor.

Title
Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool
Application Number
8/620720
Publication Number
5663637
Application Date
March 19, 1996
Publication Date
September 2, 1997
Inventor
William Joseph Surovic
Carmel
NY, US
Rock Nadeau
Essex Junction
VT, US
Anne Elizabeth McGuire
Colchester
VT, US
Robert B Lipori
Stamford
CT, US
Francis Walter Kazak
Essex Junction
VT, US
Kevin L Holland
Newburgh
NY, US
Arnold Halperin
Cortlandt Manor
NY, US
Gary Richard Doyle
Jonesville
VT, US
Steven George Barbee
Dover Plains
NY, US
Leping Li
Poughkeepsie
NY, US
Agent
Alison D Mortinger
Assignee
International Business Machines Corporation
NY, US
IPC
G01R 27/00
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