05661592 is referenced by 208 patents and cites 38 patents.

A deformable grating aparatus for modulating light is made by forming an insulating layer on a substrate, forming a first conductive layer on the insulating layer and then forming a sacrificial layer thereon. The sacrificial layer and the first conducting layer are then etched to define bit lines and busses to bonding pads. Then a layer of resilient material is formed onto the etched layers and a reflective conducting layer is formed on the resilient layer. A dielectric layer is deposited on the reflective conducting layer. The dielectric layer, the reflective conducting layer, the resilient layer and the sacrificial layer are all then etched to form a grating including a plurality of parallel elements. Thereafter the sacrificial layer is removed below the parallel elements, to suspend the parallel elements over the first conducting layer. The surface is treated to prevent the grating from adhering to the first conducting layer. A light modulator includes a substrate with an insulating layer, and a plurality of parallel conductive layers formed on the insulating layer. The ribbons are spaced apart from the conductive layers by an air space and mounted to the substrate in gaps between the conductive layers.

Title
Method of making and an apparatus for a flat diffraction grating light valve
Application Number
8/480459
Publication Number
5661592
Application Date
June 7, 1995
Publication Date
August 26, 1997
Inventor
Bryan P Staker
Palo Alto
CA, US
Ralph G Whitten
San Jose
CA, US
David M Bloom
Portola Valley
CA, US
William C Banyai
East Palo Alto
CA, US
Jonathan G Bornstein
Cupertino
CA, US
Agent
Haverstock & Associates
Assignee
Silicon Light Machines
CA, US
IPC
G02B 26/00
View Original Source