05660672 is referenced by 66 patents and cites 26 patents.

The change in thickness of a film on an underlying body such as a semiconductor substrate is monitored in situ by inducing a current in the film, and as the thickness of the film changes (either increase or decrease), the changes in the current are detected. With a conductive film, eddy currents are induced in the film by a generating an alternating electromagnetic field with a sensor which includes a capacitor and an inductor.

Title
In-situ monitoring of conductive films on semiconductor wafers
Application Number
8/419208
Publication Number
5660672
Application Date
April 10, 1995
Publication Date
August 26, 1997
Inventor
Tony Frederick Heinz
Chappaqua
NY, US
Arnold Halperin
Cortlandt Manor
NY, US
Steven George Barbee
Dover Plains
NY, US
Leping Li
Poughkeepsie
NY, US
Agent
Alison D Mortinger
Assignee
International Business Machines Corporation
NY, US
IPC
G01B 7/06
H01L 21/302
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