05660255 is referenced by 31 patents and cites 70 patents.

An active vibration isolation system (10) includes a plurality of stiff actuators, such as piezoelectric motors (12a-c; 284, 350) which support a small mass (18) inside of a case (300). A passive isolator (20) is interposed between the small mass (18) and the payload mass (M.sub.p). In the instance where the stiff actuators are piezoelectric motors, the sidewalls of the case (300) are used to provide compressive force along the variable length of each of the horizontal piezoelectric motor elements (284, 350) to prevent damage to same. Compensation circuitry (24) is connected between velocity sensors (17) and the stiff actuators to control the variable length thereof in this move-out-of-the-way system (10) and to compensate for resonating modes. Optionally, a payload mass velocity sensor (26) and associated circuitry may be used to provide additional control. Shear decouplers (282a-c; 352, 360) are used in conjunction with the piezoelectric motor elements (12a-c; 284, 350) to minimize the amount of shear force acting on the motor elements.

Title
Stiff actuator active vibration isolation system
Application Number
8/223256
Publication Number
5660255
Application Date
April 4, 1994
Publication Date
August 26, 1997
Inventor
Andreas H Von Flotow
Hood River
OR, US
Marion Richard Earles Jr
Marlboro
MA, US
Steven Frank Shedd
Plympton
MA, US
Andrew Michael Beard
Winchester
MA, US
Dale W Schubert
Sudbury
MA, US
Agent
Quarles & Brady
Assignee
Applied Power
MA, US
IPC
F16F 7/10
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