05659420 is referenced by 93 patents and cites 5 patents.

A confocal optical apparatus comprising a light source, a first aperture portion for passing light emitted from the light source and obtaining a point source, an objective lens for causing the light that has passed through the first aperture portion to converge on a measurement object, a second aperture portion located on a plane conjugate with the convergence surface on the measurement object, and light detectors for detecting light that has passed through the second aperture portion, wherein placing the first and second aperture portions in the same position and using them as the same aperture portion, as well as positioning the detection surfaces of the light detectors substantially on the same surfaces as the conjointly used identical aperture portions make it possible to reduce the size and weight of the apparatus, to perform three-dimensional shape measurements rapidly and accurately, and to facilitate the alignment of each portion.

Title
Confocal optical apparatus
Application Number
8/436469
Publication Number
5659420
Application Date
May 26, 1995
Publication Date
August 19, 1997
Inventor
Koji Shio
Hiratsuka
JP
Manabu Ando
Hiratsuka
JP
Masato Moriya
Hiratsuka
JP
Keiji Terada
Hiratsuka
JP
Toru Suzuki
Hiratsuka
JP
Kiyokazu Mizoguchi
Hiratsuka
JP
Hideyuki Wakai
Hiratsuka
JP
Agent
Diller Ramik & Wight
Assignee
Kabushiki Kaisha Komatsu SEisakusho
JP
IPC
G03H 1/00
G02B 21/22
G02B 21/36
G02B 21/00
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