05656186 is referenced by 331 patents and cites 41 patents.

In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (F.sub.th) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused to a point at or beneath the surface of a material where laser induced breakdown is desired.

The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the x, y, and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime.

Title
Method for controlling configuration of laser induced breakdown and ablation
Application Number
8/224961
Publication Number
5656186
Application Date
April 8, 1994
Publication Date
August 12, 1997
Inventor
Jeffrey A Squier
Ann Arbor
MI, US
Peter P Pronko
Dexter
MI, US
Xinbing Liu
Ann Arbor
MI, US
Paul R Lichter
Ann Arbor
MI, US
Ron Kurtz
Ann Arbor
MI, US
Victor Elner
Ann Arbor
MI, US
Subrata K Dutta
Ann Arbor
MI, US
Detao Du
Ann Arbor
MI, US
Gerard A Mourou
Ann Arbor
MI, US
Agent
Barnes Kisselle Raisch Choate Whittemore & Hulbert PC
Assignee
The Regents of the University of Michigan
MI, US
IPC
B23K 26/02
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