05646954 is referenced by 25 patents and cites 10 patents.

A diagnostic sub-routine for use by the control system of a gas discharge laser is disclosed. The sub-routine provides a prediction of the time remaining, based upon real-time laser system operations, for each pulse-limited sub-system within the laser. The sub-routine utilizes a calculated average pulse repetition rate over a user-defined time interval as the basis for predicting the time remaining, under current operating conditions, until the end-of-life for each pulse-limited sub-system; and continually updates the time prediction to account for changes in the lasers operation. The predicted time is reported to the operator to allow advanced scheduling of routine maintenance.

Title
Maintenance strategy control system and monitoring method for gas discharge lasers
Application Number
8/599744
Publication Number
5646954
Application Date
February 12, 1996
Publication Date
July 8, 1997
Inventor
Gary R Stephenson
San Diego
CA, US
Palash P Das
Vista
CA, US
Agent
David J Power
Assignee
Cymer
CA, US
IPC
H01S 3/22
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